• The University of Western Australia (M050), 35 Stirling Highway,

    6009 Perth

    Australia

  • 19 Citations
  • 3 h-Index
20142019
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Research Output 2014 2019

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Conference paper
2019

Engineering porous silicon thin films to obtain high TCR and low 1/f noise for application in thermal detectors

Sharma, P., Sun, X., Parish, G. & Keating, A., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 31-34 4 p. 8715243. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paperConference paper

Porous silicon
porous silicon
engineering
Detectors
Thin films
35 Downloads (Pure)

Using thermography to investigate thermal characteristics of porous silicon

Keating, A., McNiven, B., Sun, X. & Andrews, G. T., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. Australia: IEEE, Institute of Electrical and Electronics Engineers, p. 16-18 3 p. 8715236. (Conference on Optoelectronic and Microelectronic Materials and Devices).

Research output: Chapter in Book/Conference paperConference paper

Open Access
File
Porous silicon
porous silicon
conduction
Thin films
Conductive films
2018

Using thermography to investigate thermal characteristics of porous silicon

Keating, A., McNiven, B., Sun, X. & Andrews, G. T., 9 Dec 2018, Conference on Optoelectronic and Microelectronic Materials & Devices.

Research output: Chapter in Book/Conference paperConference paper

porous silicon
conduction
thin films
silicon films
thermal conductivity
2014

Standard photolithography compatible process released porous silicon microbeams with low stress, uniform porosity

Sun, X., Keating, A. & Parish, G., 2014, The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies APCOT 2014. South Korea: TBC, Vol. 1. p. 1-2

Research output: Chapter in Book/Conference paperConference paper

Stress control of porous silicon film for microelectromechanical systems

Sun, X., Keating, A. & Parish, G., 2014, Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD). Perth, Australia: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 214-216

Research output: Chapter in Book/Conference paperConference paper

Open Access