• The University of Western Australia (M050), 35 Stirling Highway,

    6009 Perth

    Australia

  • 19 Citations
  • 3 h-Index
20142019
If you made any changes in Pure these will be visible here soon.

Research Output 2014 2019

2019

Engineering porous silicon thin films to obtain high TCR and low 1/f noise for application in thermal detectors

Sharma, P., Sun, X., Parish, G. & Keating, A., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 31-34 4 p. 8715243. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paperConference paper

Porous silicon
porous silicon
engineering
Detectors
Thin films

Selective Oxidation and Carbonization by Laser Writing into Porous Silicon

Keating, A. & Sun, X., 21 Jan 2019, In : Advanced Materials Technologies. p. 1-7 7 p., 1800334.

Research output: Contribution to journalArticle

Open Access
Porous silicon
Carbonization
Oxidation
Propane
Lasers
39 Downloads (Pure)

Using thermography to investigate thermal characteristics of porous silicon

Keating, A., McNiven, B., Sun, X. & Andrews, G. T., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. Australia: IEEE, Institute of Electrical and Electronics Engineers, p. 16-18 3 p. 8715236. (Conference on Optoelectronic and Microelectronic Materials and Devices).

Research output: Chapter in Book/Conference paperConference paper

Open Access
File
Porous silicon
porous silicon
conduction
Thin films
Conductive films
2018

Control of In-Plane and Out-Of-Plane Stress in MEMS devices built from Porous Silicon

Afandi, Y., Sun, X., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

3 Citations (Scopus)
microbeams
Porous silicon
porous silicon
Silicon
Structural integrity
2 Downloads (Pure)

Nitrogen annealing effect on resistivity of porous silicon

Sun, X., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

File
porous silicon
nitrogen
electrical resistivity
annealing
silicon films

Pulsed heating effect on porous silicon and measurement of thermal time constant

Sun, X., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

porous silicon
time constant
heating
electric potential
silicon films

Released all-porous-silicon microstructure for spectrometer applications

Sun, X., Afandi, Y., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

porous silicon
spectrometers
microstructure
plane stress
silicon films
38 Downloads (Pure)

Resonance of Optically Driven Nano-porous Silicon Microbeams

Sun, X., Parish, G., Afandi, Y. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

File
microbeams
porous silicon
resonant frequencies
actuation

Using Current Density to Control Stress and Porosity in Porous Silicon Fabrication

Afandi, Y., Sun, X., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

Using Current Density to Control Stress and Porosity in Porous Silicon Fabrication

Afandi, Y., Sun, X., Parish, G. & Keating, A., 2018.

Research output: Contribution to conferenceConference presentation/ephemera

Using thermography to investigate thermal characteristics of porous silicon

Keating, A., McNiven, B., Sun, X. & Andrews, G. T., 9 Dec 2018, Conference on Optoelectronic and Microelectronic Materials & Devices.

Research output: Chapter in Book/Conference paperConference paper

porous silicon
conduction
thin films
silicon films
thermal conductivity
2017
5 Citations (Scopus)
Porous silicon
Silicon
Porosity
Electrolytic polishing
Fabrication
2016
368 Downloads (Pure)

Micromachining Based On Porous Silicon

Sun, X., 2016, (Unpublished)

Research output: ThesisDoctoral Thesis

File
micromachining
porous silicon
microbeams
tuning
silicon films

Micromachining to achieve low stress in sacrificial layer free, all-porous silicon microstructures

Sun, X., Keating, A. & Parish, G., 2016.

Research output: Contribution to conferenceConference presentation/ephemera

Nano-porous silicon stress study during microstructure fabrication processes

Sun, X., Keating, A. & Parish, G., 2016.

Research output: Contribution to conferenceConference presentation/ephemera

2015
8 Citations (Scopus)

Stress control of porous silicon films for microelectromechanical systems

Sun, X., Keating, A. & Parish, G., 1 Dec 2015, In : Microporous and Mesoporous Materials. 218, p. 88-94 7 p.

Research output: Contribution to journalArticle

Porous silicon
silicon films
porous silicon
microelectromechanical systems
MEMS
2014
3 Citations (Scopus)
97 Downloads (Pure)
Open Access
File
microbeams
Porous silicon
Photolithography
photolithography
porous silicon
microbeams
photolithography
porous silicon
electropolishing
porosity

Standard photolithography compatible process released porous silicon microbeams with low stress, uniform porosity

Sun, X., Keating, A. & Parish, G., 2014, The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies APCOT 2014. South Korea: TBC, Vol. 1. p. 1-2

Research output: Chapter in Book/Conference paperConference paper

Stress control of porous silicon film for microelectromechanical systems

Sun, X., Keating, A. & Parish, G., 2014, Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD). Perth, Australia: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 214-216

Research output: Chapter in Book/Conference paperConference paper

Open Access