• The University of Western Australia (M050), 35 Stirling Highway,

    6009 Perth

    Australia

  • 19 Citations
  • 3 h-Index
20142019
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Fingerprint Dive into the research topics where Xiao Sun is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Physics & Astronomy

Chemistry and Materials

modulus of elasticity
nitrogen
porous silicon

Engineering

CMOS
annealing
electrical resistivity
electropolishing
engineering
heating
microelectromechanical systems
micromachining
photolithography

General

conduction
microstructure
porosity
resonant frequencies
silicon films
spectrometers
thin films

Mathematical and Computer Sciences

sensitivity
time constant

Physics

microbeams
physics
thermal conductivity

Engineering & Materials Science

Annealing
Carbonization
Conductive films
Detectors
Electrolytic polishing
Fabrication
MEMS
Microelectronics
Micromachining
Microstructure
Oxidation
Photolithography
Picture archiving and communication systems
Porosity
Porous silicon
Silicon
Substrates
Tensile stress
Thin films

Chemical Compounds

Annealing
Carbonization
Conductive films
Detectors
Electrolytic polishing
Fabrication
MEMS
Microstructure
Oxidation
Photolithography
Picture archiving and communication systems
Porosity
Porous silicon
Propane
Silicon
Substrates
Tensile stress
Thin films