• The University of Western Australia (M050), 35 Stirling Highway,

    6009 Perth

    Australia

  • 19 Citations
  • 3 h-Index
20142019
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Fingerprint Dive into the research topics where Xiao Sun is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

Physics & Astronomy

Chemistry and Materials

porous silicon
nitrogen
modulus of elasticity

Physics

microbeams
thermal conductivity
physics

General

silicon films
porosity
thin films
resonant frequencies
conduction
microstructure
spectrometers

Engineering

photolithography
microelectromechanical systems
electropolishing
annealing
micromachining
CMOS
engineering
heating
electrical resistivity

Mathematical and Computer Sciences

time constant
sensitivity

Engineering & Materials Science

Porous silicon
Porosity
MEMS
Micromachining
Electrolytic polishing
Thin films
Annealing
Carbonization
Photolithography
Silicon
Microelectronics
Substrates
Oxidation
Detectors
Picture archiving and communication systems
Fabrication
Tensile stress
Microstructure
Conductive films

Chemical Compounds

Porous silicon
Porosity
Silicon
MEMS
Electrolytic polishing
Thin films
Annealing
Carbonization
Photolithography
Substrates
Oxidation
Detectors
Picture archiving and communication systems
Fabrication
Propane
Tensile stress
Microstructure
Conductive films