Mariusz Martyniuk

2025

Micromachined Double-Membrane Mechanically Tunable Metamaterial for Thermal Infrared Filtering

Bannik, O., Kovalev, F., Liu, M., Zawierta, M., Silva, D., Faraone, L., Martyniuk, M. & Shadrivov, I., 26 Mar 2025, (E-pub ahead of print) In: Advanced Photonics Research. 10 p., 2400185.

Research output: Contribution to journal › Article › peer-review

Open Access

2024

Determination of elasto-plastic properties of semiconducting Hg<sub>1-x</sub>Cd<sub>x</sub>Se using nanoindentation

Zhang, Z., Pan, W., Martyniuk, M., Ma, S., Faraone, L. & Lei, W., Jan 2024, In: Infrared Physics & Technology. 136, 8 p., 105057.

Research output: Contribution to journal › Article › peer-review

Open Access

1 Citation (Scopus)

Emerging technologies for infrared sensing and imaging

Kala, H., Pan, W., Gu, R., Silva, D., Antoszewski, J., Umana-Membreno, G., Lei, W., Dehdashtiakhavan, N., Zawierta, M., Tripathi, D., Liu, Y., Gill, G. S., Gurusamy, J., Keating, A., Dell, J., Nener, B., Martyniuk, M. & Faraone, L., 2024. 4 p.

Research output: Contribution to conference › Other › peer-review

Highly oriented as-grown beta-phase bismuth oxide for optical MEMS

Jeffery, R. D., Nachimuthu, R. K., Faraone, L. & Martyniuk, M., 14 Dec 2024, In: Journal of Materials Research. 39, 23, p. 3306-3315 10 p., 118478.

Research output: Contribution to journal › Article › peer-review

Open Access

Insulator-on-Conductor Fouling Amplifies Aqueous Electrolysis Rates

Rodriguez, H. M., Martyniuk, M., Iyer, K. S. & Ciampi, S., 17 Apr 2024, In: Journal of the American Chemical Society. 146, 15, p. 10299-10311 13 p.

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Silicon-Air-Silicon DBRs for Electrostatically Actuated Infrared Filter Applications

Silva, J. R., Silva, D., Martyniuk, M., Putrino, G. & Faraone, L., 15 Mar 2024, In: Journal of Lightwave Technology. 42, 6, p. 2057-2068 12 p.

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Technologies for adaptive SWIR multispectral imaging

Silva, D., Kala, H., Zawierta, M., Tripathi, D., Gill, G. S., Antoszewski, J., Umana-Membreno, G., Keating, A., Dell, J., Nener, B., Martyniuk, M. & Faraone, L., 2024, Electro-Optical and Infrared Systems: Technology and Applications XXI. Hickman, D. L., Bursing, H., Steinvall, O. & Soan, P. J. (eds.). SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, Vol. 13200. 5 p. 1320015. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 13200).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Towards MEMS-enabled tunable metamaterial bandpass filter for long-wavelength infrared

Bannik, O., Liu, M., Kovalev, F., Shadrivov, I., Faraone, L. & Martyniuk, M., 7 Oct 2024, 2024 49th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2024. USA: IEEE, Institute of Electrical and Electronics Engineers, 2 p. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

2023

Broadband Microelectromechanical Systems-Based Silicon Nitride Photonic Switch

Swain, S., Zawierta, M., Gurusamy, J., Martyniuk, M., Keating, A., Putrino, G., Faraone, L. & Silva, D., Oct 2023, (E-pub ahead of print) In: Advanced Photonics Research. 11 p., 2300213.

Research output: Contribution to journal › Article › peer-review

Open Access

6 Citations (Web of Science)

Infrared and terahertz spectrally adaptive filters based on MEMS technologies

Martyniuk, M., Silva, K. K. M. B. D., Kala, H., Zawierta, M., Wallace, V. P., Walus, K., Faraone, L. & Shadrivov, I. V., 17 Mar 2023, Smart Photonic and Optoelectronic Integrated Circuits 2023. He, S., He, S. & Vivien, L. (eds.). SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 12 p. 124250H. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12425).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

1 Citation (Scopus)

Sensitivity analysis of a dielectric loaded 1 × 2 directional coupler switch based on foundry process optical waveguides

Hill, M. T., Silva, D., Martyniuk, M. & Faraone, L., 1 Aug 2023, In: Optical Engineering. 62, 8, p. 87103 1 p.

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

2022

3D Printed Fabry-Perot Filters for Terahertz Spectral Range

Revuri, P. K., Walus, K., Wallace, V. P., Silva, K. K. M. B. D., Keating, A., Faraone, L. & Martyniuk, M., Dec 2022, In: Journal of Infrared, Millimeter and Terahertz Waves. 43, 11-12, p. 942-956 15 p.

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Application of a Microfabricated Microwave Resonator in a Co-Pd-Based Magnetic Hydrogen-Gas Sensor

Schefer, T. A., Narkowicz, R., Lenz, K., Ganss, F., Roberts, M. P., Hellwig, O., Martyniuk, M., Lindner, J. & Kostylev, M., Aug 2022, In: Physical Review Applied. 18, 2, 024015.

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Ge/BaF₂ thin-films for surface micromachined mid-wave and long-wave infrared reflectors

Gill, G., Tripathi, D., Keating, A., Putrino, G., Silva, D., Martyniuk, M. & Faraone, L., 1 Jan 2022, In: Journal of Optical Microsystems. 2, 1, 23 p., 011002.

Research output: Contribution to journal › Article › peer-review

Open Access

3 Citations (Scopus)

4 Downloads (Pure)

Iron oxide-Palladium core-shell nanospheres for ferromagnetic resonance-based hydrogen gas sensing

Khan, S., Lawler, N. B., Bake, A., Rahman, R., Cortie, D., Iyer, K. S., Martyniuk, M. & Kostylev, M., 8 Feb 2022, In: International Journal of Hydrogen Energy. 47, 12, p. 8155-8163 9 p.

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Large-area narrowband Fabry–Pérot interferometers for long-wavelength infrared spectral sensing

Gill, G., Zawierta, M., Tripathi, D., Keating, A., Putrino, G., Silva, D., Faraone, L. & Martyniuk, M., May 2022, In: Journal of Optical Microsystems. 2, 2, 16 p., 023502.

Research output: Contribution to journal › Article › peer-review

Open Access

3 Citations (Scopus)

Mechanical properties of thermally evaporated germanium (Ge) and barium fluoride (BaF₂) thin-films

Gill, G., Jones, C. A., Tripathi, D., Keating, A., Putrino, G., Silva, D., Faraone, L. & Martyniuk, M., Feb 2022, In: MRS Communications. 12, 1, p. 112-118 7 p.

Research output: Contribution to journal › Article › peer-review

5 Citations (Web of Science)

MEMS for multispectral imaging

Martyniuk, M., Dilusha Silva, K. K. M. B., Putrino, G., Kala, H., Tripathi, D. K. & Faraone, L., 5 Mar 2022, Smart Photonic and Optoelectronic Integrated Circuits 2022. He, S., He, S. & Vivien, L. (eds.). SPIE - International Society for Optical Engineering, 1200505. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12005).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

3 Citations (Scopus)

Nanoindentation of Hg_0.7Cd_0.3Se prepared by molecular beam epitaxy

Zhang, Z., Pan, W., Martyniuk, M., Ma, S., Faraone, L. & Lei, W., Dec 2022, In: Infrared Physics and Technology. 127, 104446.

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Optical Microelectromechanical Systems Technologies for Spectrally Adaptive Sensing and Imaging

Martyniuk, M., Silva, K. K. M. B. D., Putrino, G., Kala, H., Tripathi, D. K., Singh Gill, G. & Faraone, L., 14 Jan 2022, In: Advanced Functional Materials. 32, 3, 2103153.

Research output: Contribution to journal › Review article › peer-review

17 Citations (Scopus)

2021

Achieving ultra-large elastic strains in Nb thin films on NiTi phase-transforming substrate by the principle of lattice strain matching

Motazedian, F., Zhang, J., Wu, Z., Jiang, D., Sarkar, S., Martyniuk, M., Yan, C., Liu, Y. & Yang, H., 1 Jan 2021, In: Materials and Design. 197, 109257.

Research output: Contribution to journal › Article › peer-review

Open Access

14 Citations (Scopus)

Effect of Hydrogen Gas on Ferromagnetic Resonance Properties of Ni-Co-Pd Ternary Alloy Films

Schefer, T. A., Martyniuk, M. & Kostylev, M., Feb 2021, In: IEEE Transactions on Magnetics. 57, 2, 9154727.

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile

Silva, J. R., Kala, H., Tripathi, D. K., Papanastasiou, K., Silva, K. K. M. B. D., Putrino, G., Martyniuk, M., Keating, A., Antoszewski, J. & Faraone, L., Jul 2021, In: Journal of Micromechanics and Microengineering. 31, 7, 075001.

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

2020

Crystallization of bismuth iron garnet thin films using capacitively coupled oxygen plasmas

Jeffery, R. D., Sharda, R., Woodward, R. C., Faraone, L. & Martyniuk, M., 31 Jan 2020, In: Journal of Applied Physics. 127, 4, 043302.

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

2019

Atomic force microscopy with integrated on-chip interferometric readout

Zawierta, M., Jeffery, R. D., Putrino, G., Silva, D., Keating, A., Martyniuk, M. & Faraone, L., 1 Oct 2019, In: Ultramicroscopy. 205, p. 75-83 9 p.

Research output: Contribution to journal › Article › peer-review

Open Access

File

9 Citations (Scopus)

183 Downloads (Pure)

Determining intrinsic stress and strain state of fibre-textured thin films by x-ray diffraction measurements using combined asymmetrical and Bragg-Brentano configurations

Motazedian, F., Wu, Z., Zhang, J., Samsam Shariat, B., Jiang, D., Martyniuk, M., Liu, Y. & Yang, H., 5 Nov 2019, In: Materials and Design. 181, 108063.

Research output: Contribution to journal › Article › peer-review

Open Access

29 Citations (Scopus)

Large area silicon-air-silicon DBRs for infrared filter applications

Silva , J., Kala, H., Tripathi, D., Silva, B., Martyniuk, M., Keating, A., Putrino, G. & Faraone, L., 1 Feb 2019, In: Journal of Lightwave Technology. 37, 3, p. 769-779 11 p., 8532288.

Research output: Contribution to journal › Article › peer-review

Open Access

File

19 Citations (Scopus)

409 Downloads (Pure)

MEMS based hydrogen sensing with parts-per-billion resolution

Gurusamy, J. T., Putrino, G., Jeffery, R. D., Silva, K. K. M. B. D., Martyniuk, M., Keating, A. & Faraone, L., 15 Feb 2019, In: SENSORS AND ACTUATORS B-CHEMICAL. 281, p. 335-342 8 p.

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Photostriction actuation of silicon-germanium bilayer cantilevers

Chenniappan, V., Umana-Membreno, G. A., Silva, K. K. M. B. D., Martyniuk, M., Keating, A., Dell, J. M. & Faraone, L., 28 Mar 2019, In: Journal of Applied Physics. 125, 12, 8 p., 125106.

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Ultrathin tunable terahertz absorbers based on electrostatically actuated metamaterial

Liu, M., Susli, M., Silva, D., Putrino, G., Kala, H., Fan, S., Cole, M., Faraone, L., Wallace, V. P., Padilla, W. J., Powell, D. A., Shadrivov, I. V. & Martyniuk, M., 9 Oct 2019, Electro-Optical and Infrared Systems: Technology and Applications XVI. Hickman, D. L. & Bursing, H. (eds.). France: SPIE - International Society for Optical Engineering, Vol. 11159. 1115908. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11159).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

2018

Effect of thermal annealing on stress relaxation and crystallisation of ion beam sputtered amorphous Si_1-xGe_x thin films

Guo, F., Martyniuk, M., Silva, D., Liu, Y., Brookshire, K. & Faraone, L., 15 Oct 2018, In: Materials and Design. 156, p. 389-397 9 p.

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

MEMS-based Low SWaP solutions for multi/hyperspectral infrared sensing and imaging

Silva, J., Kala, H., Tripathi, D. K., Silva, K. K. M. B. D., Martyniuk, M., Keating, A., Putrino, G. & Faraone, L., 24 Oct 2018, RAPID 2018 - 2018 IEEE Research and Applications of Photonics In Defense Conference. USA: IEEE, Institute of Electrical and Electronics Engineers, p. 189-192 4 p. 8508961

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

3 Citations (Scopus)

Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors

Silva, J., Thripathi, D., Kala, H., Silva, D., Putrino, G., Keating, A., Martyniuk, M. & Faraone, L., 2 Jul 2018, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 35-38 4 p. 8715240. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

1 Citation (Scopus)

Modelling and Charactrization of the MEMS based filters for the spectroscopic imaging applications

Tripathi, D. K., Kala, H., Silva, K. K. M. B. D., Martyniuk, M., Putrino, G., Nener, B. & Faraone, L., 2 Jul 2018, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 43-46 4 p. 8715253. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

2 Citations (Scopus)

Modelling and Fabrication of Anti-Stiction Features for Electrostatically Actuated Microsystems

Gill, G. S., Zawierta, M., Tripathi, D. K., Martyniuk, M., Dilusha Silva, K. K. M. B., Putrino, G., Keating, A. & Faraone, L., 2 Jul 2018, p. 7-10. 4 p.

Research output: Contribution to conference › Conference presentation/ephemera › peer-review

1 Citation (Scopus)

Modelling of damping characteristics in silicon-gold bilayer cantilevers

Chenniappan, V., Silva, K. K. M. B. D., Umana-Membreno, G. A., Martyniuk, M., Keating, A., Dell, J. M. & Faraone, L., 2 Jul 2018, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 5-6 2 p. 8715248. (Conference on Optoelectronic and Microelectronic Materials and Devices).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Response enhancement of a magnetic-film based hydrogen gas sensor using size reduction to microchip dimensions

Khan, S., Martyniuk, M. & Kostylev, M., 2 Jul 2018, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 19-21 3 p. 8715239. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

1 Citation (Scopus)

Silicon and Silicon dioxide thin films deposited by ICPCVD at low temperature and high rate for MEMS applications

Revuri, P. K., Tripathi, D. K., Martyniuk, M., Silva, K. K. M. B. D., Putrino, G., Keating, A. & Faraone, L., 2 Jul 2018, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 24-26 3 p. 8715249. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

6 Citations (Scopus)

2017

A high deposition rate amorphous-silicon process for use as a thick sacrificial layer in surface-micromachining

Zawierta, M., Martyniuk, M., Jeffery, R., Putrino, G., Keating, A., Silva, B. & Faraone, L., Apr 2017, In: Journal of Microelectromechanical Systems. 26, 2, p. 406-414 9 p., 7835204.

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Control of Sidewall Profile in Dry Plasma Etching of Polyimide

Zawierta, M., Martyniuk, M., Jeffery, R. D., Putrino, G., Keating, A., Dilusha Silva, K. K. M. B. & Faraone, L., 1 Jun 2017, In: Journal of Microelectromechanical Systems. 26, 3, p. 593-600 8 p., 7888473.

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Fast tunable terahertz absorber based on a MEMS-driven metamaterial

Liu, M., Susli, M., Silva, D., Putrino, G., Kala, H., Fan, S., Cole, M., Faraone, L., Wallace, V. P., Padilla, W. J., Powell, D. A., Martyniuk, M. & Shadrivov, I. V., 2017, CLEO: QELS_Fundamental Science, CLEO_QELS 2017. OSA - The Optical Society, (Optics InfoBase Conference Papers; vol. Part F42-CLEO_QELS 2017).

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Fast tunable terahertz absorber based on a MEMS-driven metamaterial

Liu, M., Susli, M., Silva, D., Putrino, G., Kala, H., Fan, S., Cole, M., Faraone, L., Wallace, V. P., Padilla, W. J., Powell, D. A., Martyniuk, M. & Shadrivov, I. V., 25 Oct 2017, 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. United States: IEEE, Institute of Electrical and Electronics Engineers, Vol. 2017-January. p. 1-2 2 p.

Research output: Chapter in Book/Conference paper › Conference paper › peer-review

Large-Area MEMS Tunable Fabry-Perot Filters for Multi/Hyperspectral Infrared Imaging

Mao, H., Tripathi, D. K., Ren, Y., Silva, K. K. M. B. D., Martyniuk, M., Antoszewski, J., Bumgarner, J., Dell, J. M. & Faraone, L., 1 Mar 2017, In: IEEE Journal on Selected Topics in Quantum Electronics. 23, 2, p. 45-52 8 p., 7795210.

Research output: Contribution to journal › Article › peer-review

38 Citations (Scopus)

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

Liu, M., Susli, M., Silva, D., Putrino, G., Kala, H., Fan, S., Cole, M., Faraone, L., Wallace, V. P., Padilla, W. J., Powell, D. A., Shadrivov, I. V. & Martyniuk, M., 28 Aug 2017, In: Microsystems & Nanoengineering. 3, 6 p., 17033.

Research output: Contribution to journal › Article › peer-review

Open Access

91 Citations (Scopus)

2016

An investigation of the optical and mechanical properties of ICPCVD silicon oxide and thermally evaporated MgF2 thin films for MEMS applications

Silva Castillo, J., Tripathi, D., Silva, B., Martyniuk, M., Antoszewski, J. & Faraone, L., 2016.

Research output: Contribution to conference › Abstract › peer-review

Cerium substituted rare earth iron garnets prepared on non-lattice matched silica

Nachimuthu, R. K., Jeffery, R., Martyniuk, M., Woodward, R., Saunders, M., O'Donnell, K., Dell, J. & Faraone, L., 2016.

Research output: Contribution to conference › Abstract › peer-review

Chemical and Biological Sensors Based on Microelectromechanical Systems

Putrino, G. M., Keating, A., Martyniuk, M. & Dell, J. M., 22 Jan 2016, Nanomaterials - Science and Applications. D. K. A. M. P. R. (ed.). Singapore: Pan Stanford Publishing Pte. Ltd, p. 107-145 39 p.

Research output: Chapter in Book/Conference paper › Chapter › peer-review

2 Citations (Scopus)

Detection of hydrogen using mechanical response of a microbridge

Gurusamy, J. T., Jeffery, R., Putrino, G., Silva, B., Martyniuk, M., Keating, A. & Faraone, L., 2016.

Research output: Contribution to conference › Abstract › peer-review

Dry polyimide etching with controlled sidewall profile for microelectromechanical systems

Zawierta, M., Martyniuk, M., Keating, A., Silva, B., Putrino, G., Jeffery, R. & Faraone, L., 2016.

Research output: Contribution to conference › Abstract › peer-review

Investigation of Thermal Expansion Effects on Si-Based MEMS Structures

Brookshire, K., Rafiei, R., Martyniuk, M., Silva, D., Faraone, L. & Liu, Y., Jun 2016, In: Journal of Microelectromechanical Systems. 25, 3, p. 549-556 8 p., 7458158.

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Mariusz Martyniuk

Research output

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