• The University of Western Australia (M018), 35 Stirling Highway,

    6009 Perth

    Australia

  • 361 Citations
  • 9 h-Index
19992021
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Research Output 1999 2019

Filter
Conference paper
2019

Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors

Silva, J., Thripathi, D., Kala, H., Silva, D., Putrino, G., Keating, A., Martyniuk, M. & Faraone, L., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 35-38 4 p. 8715240. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paperConference paper

Optical filters
optical filters
mirrors
filters
Thin films

Modelling and Charactrization of the MEMS based filters for the spectroscopic imaging applications

Tripathi, D. K., Kala, H., Silva, K. K. M. B. D., Martyniuk, M., Putrino, G., Nener, B. & Faraone, L., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 43-46 4 p. 8715253. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paperConference paper

Silicon
Full width at half maximum
microelectromechanical systems
MEMS
Distributed Bragg reflectors

Modelling of damping characteristics in silicon-gold bilayer cantilevers

Chenniappan, V., Silva, K. K. M. B. D., Umana-Membreno, G. A., Martyniuk, M., Keating, A., Dell, J. M. & Faraone, L., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 5-6 2 p. 8715248. (Conference on Optoelectronic and Microelectronic Materials and Devices).

Research output: Chapter in Book/Conference paperConference paper

Silicon
Gold
Damping
damping
gold

Silicon and Silicon dioxide thin films deposited by ICPCVD at low temperature and high rate for MEMS applications

Revuri, P. K., Tripathi, D. K., Martyniuk, M., Silva, K. K. M. B. D., Putrino, G., Keating, A. & Faraone, L., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 24-26 3 p. 8715249. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paperConference paper

Silicon oxides
Silicon
Deposition rates
Silicon Dioxide
microelectromechanical systems

Ultrathin tunable terahertz absorbers based on electrostatically actuated metamaterial

Liu, M., Susli, M., Silva, D., Putrino, G., Kala, H., Fan, S., Cole, M., Faraone, L., Wallace, V. P., Padilla, W. J., Powell, D. A., Shadrivov, I. V. & Martyniuk, M., 9 Oct 2019, Electro-Optical and Infrared Systems: Technology and Applications XVI. Hickman, D. L. & Bursing, H. (eds.). France: SPIE-INT SOC OPTICAL ENGINEERING, Vol. 11159. 1115908. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11159).

Research output: Chapter in Book/Conference paperConference paper

Metamaterials
Absorber
absorbers
microelectromechanical systems
MEMS
2017

Fast tunable terahertz absorber based on a MEMS-driven metamaterial

Liu, M., Susli, M., Silva, D., Putrino, G., Kala, H., Fan, S., Cole, M., Faraone, L., Wallace, V. P., Padilla, W. J., Powell, D. A., Martyniuk, M. & Shadrivov, I. V., 25 Oct 2017, 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. United States: IEEE, Institute of Electrical and Electronics Engineers, Vol. 2017-January. p. 1-2 2 p.

Research output: Chapter in Book/Conference paperConference paper

Metamaterials
microelectromechanical systems
MEMS
absorbers
Atoms
2014

Capturing the Impulse Response of a Second Order System

Young, M., Jeffery, R., Putrino, G., Silva, D., Martyniuk, M., Keating, A. & Faraone, L., 2014, Conference on Optoelectronic and Microelectronic Materials and Devices. United States of America: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 174-176

Research output: Chapter in Book/Conference paperConference paper

3 Citations (Scopus)

Long-term Stability of ICPCVD a-Si Under Prolonged Heat Treatment

Brookshire, K., Martyniuk, M., Silva, D., Liu, Y. & Faraone, L., 2014, Conference on Optoelectronic and Microelectronic Materials and Devices. Perth, Western Australia: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 160-163

Research output: Chapter in Book/Conference paperConference paper

Low Temperature Through-Wafer Reactive Ion Etching for MEMS

Zawierta, M., Antoszewski, J., Martyniuk, M., Keating, A., Silva, D., Putrino, G., Jeffery, R. & Faraone, L., 2014, Proceedings of the 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD 2014). United States of America: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 83-86

Research output: Chapter in Book/Conference paperConference paper

2 Citations (Scopus)

Nanoindentation of Si1-xGex thin films prepared by biased target ion beam deposition

Ge, R., Hou, X., Brookshire, K., Krishnan, N. R., Silva, D., Bumgarner, J., Liu, Y., Faraone, L. & Martyniuk, M., 2014, Conference on Optoelectronic and Microelectronic Materials and Devices. Faraone, L. & Martyniuk, M. (eds.). USA: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 210-213 (Conference on Optoelectronic and Microelectronic Materials and Devices).

Research output: Chapter in Book/Conference paperConference paper

4 Citations (Scopus)

Recent developments towards low-cost MEMS spectrometers

Silva, D., Tripathi, D. K., Mao, H., Antoszewski, J., Nener, B., Dell, J. & Faraone, L., 2014, Proceedings of SPIE - The International Society for Optical Engineering. SPIE, Vol. 9101. p. 910108

Research output: Chapter in Book/Conference paperConference paper

MEMS
Spectrometers
Infrared radiation
Costs

Towards MEMS-based Long-wavelength Infrared Tuneable Fabry-Perot Filters

Mao, H. F., Martyniuk, M., Silva, D., Antoszewski, J., Bumgarner, J. & Faraone, L., 2014, COMMAD 2014 Conference Proceedings. United States of America: IEEE, Institute of Electrical and Electronics Engineers, Vol. N/A. p. 149-152

Research output: Chapter in Book/Conference paperConference paper

2013
1 Citation (Scopus)

A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications

Tripathi, D., Silva, D., Rafiei, R., Bumgarner, J., Martyniuk, M., Nguyen, T., Antoszewski, J., Dell, J. & Faraone, L., 2013, 2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings. United States of America: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 289-293

Research output: Chapter in Book/Conference paperConference paper

3 Citations (Scopus)

A Versatile Instrumentation System for MEMS-Based Device Optical Characterisation

Rafiei, R., Basedow, R., Silva, D., Gurusamy, J., Silva Castillo, J., Tripathi, D., Dell, J. & Faraone, L., 2013, Proceedings of SPIE Micro/Nano Materials, Devices and Systems. United States of America: SPIE, Vol. 8923. p. 89232V-1 - 89232V-9

Research output: Chapter in Book/Conference paperConference paper

1 Citation (Scopus)

Cryogenic optical profilometry for the calculation of coefficient of thermal expansion in thin films

Brookshire, K. L., Rafiei, R., Martyniuk, M., Silva, D., Bumgarner, J., Basedow, R., Liu, Y. & Faraone, L., 2013, Proceedings of SPIE Micro+Nano Materials, Devices, and Applications. United States of America: SPIE, Vol. 8923. p. 8923V-1 - 89231V-6

Research output: Chapter in Book/Conference paperConference paper

Efficient sub-harmonic phase-screen generation for modelling of free-space laser communications

Silva, D. & Nener, B., 2013, 2013 8th IEEE International Conference on Industrial and Information Systems (ICIIS). USA: IEEEE, Vol. 2013. p. 219-223

Research output: Chapter in Book/Conference paperConference paper

1 Citation (Scopus)

Long-wavelength infrared Fabry-Perot etalon for multi-spectral thermal imaging

Mao, H. F., Keating, A., Silva, D., Dell, J. & Faraone, L., 2013, Proceedings of the 2015 SPIE Micro/Nano Materials, Devices and Systems. United States of America: SPIE, Vol. 8923. p. 89234P-1 - 89234P-6

Research output: Chapter in Book/Conference paperConference paper

Macromodel for the transient simulation of electrostatically actuated fixed-fixed beams

Susli, M., Boussaid, F., Silva, D., Faraone, L. & Dell, J., 2013, IEEE International Conference on Circuits and Systems (ICCAS2013). USA: IEEE, Institute of Electrical and Electronics Engineers, Vol. NA. p. 130-134

Research output: Chapter in Book/Conference paperConference paper

2012

A high-sensitivity mass sensor based on torsion of micro-beams

Chenniappan, V., Martyniuk, M., Silva, D., Keating, A., Dell, J. & Faraone, L., 2012, APMC10 / ICONN2012 / ACMM22 CONFERENCE PROCEEDINGS. Australia: The University of Western Australia, Vol. 1. p. 818-1 - 818-2

Research output: Chapter in Book/Conference paperConference paper

Compositional and mechanical properties of PECVD silicon for thin-film optical applications

Tripathi, D. K., Mao, H., Silva, D. & Faraone, L., 2012, COMMAD 2012 PROCEEDINGS. United States: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 185-186

Research output: Chapter in Book/Conference paperConference paper

2 Citations (Scopus)

Effect of FIB milling on MEMS SOI Cantilevers

Chenniappan, V., Singh, P. P., Renilkumar, M., Varma, M., Bhat, N., Pratap, R., Martyniuk, M., Keating, A., Umana Membreno, G. A., Silva, D., Dell, J. & Faraone, L., 2012, Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on. United States: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 165-166

Research output: Chapter in Book/Conference paperConference paper

microelectromechanical systems
ion beams
insulators
silicon
wafers

Optical read-out scheme based on Grated Waveguide Cantilever cavity resonance for interrogation of cantilever sensor arrays

Prakash, P., Renilkumar, M., Chenniappan, V., Faraone, L., Umana Membreno, G. A., Silva, D., Keating, A., Martyniuk, M., Dell, J., Varma, M. M., Bhat, N. & Pratap, R., 2012, COMMAD 2012 PROCEEDINGS. United States: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 69-70

Research output: Chapter in Book/Conference paperConference paper

Tuneable IR Photodetectors for Spectroscopic Applications

Antoszewski, J., Nguyen, T., Silva, D. & Faraone, L., 2012, 26th European Conference on Solid-State Transducers (EUROSENSOR 2012): Proceedings of a meeting held 9-12 September 2012, Krakow, Poland.. Netherlands: Elsevier, Vol. 47. p. 406-409 (Procedia Engineering; vol. 47).

Research output: Chapter in Book/Conference paperConference paper

Open Access
photometers
mirrors
actuation
nonuniformity
microelectromechanical systems
2011

On the accuracy of decay constant measurement by swept-cavity heterodyne cavity ringdown spectroscopy

Silva, D., Van Der Walt, A., Dell, J. & Faraone, L., 2011, Proceedings of SPIE on CD-ROM: Defense, Security, and Sensing 2011: Emerging Technologies and Laser Sensors and Systems. United States of America: SPIE, Vol. 8032. p. 80320F-1-80320F-8

Research output: Chapter in Book/Conference paperConference paper

14 Citations (Scopus)

Scintillation index of the free space optical channel: Phase screen modelling and experimental results

Mudge, K. A., Silva, K. K. M. B. D., Clare, B. A., Grant, K. J. & Nener, B. D., 2011, 2011 International Conference on Space Optical Systems and Applications. USA: IEEE, Institute of Electrical and Electronics Engineers, p. 403-409 7 p. 5783706

Research output: Chapter in Book/Conference paperConference paper

free-space optical communication
scintillation
receivers
apertures
atmospheric turbulence
2010

Biased-target ion beam deposited Polycrystalline Bismuth oxide as a write-once blue-ray archiving medium

Silva, D., Jefferey, R. D., Martyniuk, M., Limbouris, J. N., Woodward, R. C., Dell, J. & Faraone, L., 2010, APCOT 2010 – The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology. Dell, J., Wlodarski, W., Keating, A. & Martyniuk, M. (eds.). Perth, Western Australia ed. Perth, Western Australia: The University of Western Australia, Vol. 1. p. 84

Research output: Chapter in Book/Conference paperConference paper

Capacitive Sensing Circuit for Closed-Loop Control of Wide Tuning Range Microspectrometers

Susli, M., Silva, D., Boussaid, F., Faraone, L. & Dell, J., 2010, Proceedings of SPIE: Defense, Security, and Sensing 2010: Emerging Technologies and Laser Sensors and Systems. Druy, M. A., Brown, C. D. & Crocombe, R. A. (eds.). Orlando, Florida, USA ed. United States of America: SPIE, Vol. 7680. p. N/A

Research output: Chapter in Book/Conference paperConference paper

2007
3 Citations (Scopus)

Fabry-Pérot MEMS microspectrometers spanning the SWIR and MWIR

Antoszewski, J., Winchester, K. J., Dell, J., Faraone, L., Keating, A., Silva, D., Nguyen, T., Musca, C. & Samardzic, O., 2007, Proceedings of SPIE - Infrared Technology and Applications XXXIII. Andresen, B. F., Fulop, G. F. & Norton, P. R. (eds.). Orlando, Florida, USA ed. United States of America: SPIE, Vol. 6542. p. 65423G-1 - 65423G-8

Research output: Chapter in Book/Conference paperConference paper

Optical Performance of a MEMS Tunable IR Microspectrometer

Keating, A., Antoszewski, J., Silva, D., Winchester, K. J., Nguyen, T., Dell, J., Musca, C. & Faraone, L., 2007, COMMAD '06 Proceedings of the 2006 Conference on Optoelectronic and Microelectronic Materials and Devices. Faraone, L., Betts, S., Dell, J., Musca, C., Nener, B., Parish, G. & Wehner, J. (eds.). Perth, Western Australia ed. United States of America: IEEE, Institute of Electrical and Electronics Engineers, Vol. CD. p. 224-227

Research output: Chapter in Book/Conference paperConference paper

2006

Adaptive Focal Plane Array (AFPA) Technologies for Integrated Infrared Microsystems (Invited paper)

Mitra, P., Beck, J. D., Skokan, R., Robinson, J. E., Antoszewski, J., Winchester, K. J., Keating, A., Nguyen, T., Silva, D., Musca, C., Dell, J. & Faraone, L., 2006, Proceedings of SPIE on Intelligent Integrated Microsystems. Athale, R. A. & Zolper, J. C. (eds.). Kissimmee, Florida, USA ed. United States of America: SPIE, Vol. 6232. p. 62320G-1 - 62320G-11

Research output: Chapter in Book/Conference paperConference paper

9 Citations (Scopus)

SWIR Hyperspectral Detection with Integrated HgCdTe Detector and Tunable MEMS Filter

Mitra, P., Beck, J. D., Skokan, M. R., Robinson, J. E., Antoszewski, J., Winchester, K. J., Keating, A., Nguyen, T., Silva, D., Musca, C., Dell, J. & Faraone, L., 2006, SPIE Proceeding ¿ Optics and Photonics 2006: Remote and In Situ Sensing and Infrared Detectors. Dereniak, E. L. & Sampson, R. E. (eds.). San Diego, CA, USA ed. United States of America: SPIE, Vol. 6295. p. 62950G-1 - 62950G-11

Research output: Chapter in Book/Conference paperConference paper

Tuneable Fabry-Perot filters operating in the 3 to 5um range for infrared micro-spectrometer applications

Antoszewski, J., Keating, A., Winchester, K. J., Nguyen, T., Silva, D., Musca, C., Dell, J., Samardzic, O. & Faraone, L., 2006, Proceedings of SPIE on MEMS, MOEMS, and Micromachining II. Ürey, H. & El-Fatatry, A. (eds.). Strasbourg, France ed. United States of America: SPIE, Vol. 6186. p. 618608-1 - 618608-9

Research output: Chapter in Book/Conference paperConference paper

2004
1 Citation (Scopus)

Refractive index tomography of turbid media by bifocal optical coherence refractometry

Zvyagin, A. V., Alexandrov, S., Silva, D., Hillman, T., Armstrong, J., Tsuzuki, T. & Sampson, D., 2004, Proceedings of SPIE, volume 5316. Tuchin, V. V., Izatt, J. A. & Fujimoto, J. G. (eds.). San Jose, California, USA ed. Bellingham, USA: SPIE, Vol. 5316. p. 155-166

Research output: Chapter in Book/Conference paperConference paper

2003

The frequency-domain delay line in optical coherence tomography: design, capabilities, and limitations

Sampson, D., Zvyagin, A. V., Smith, E. D. J., Walton, I. D., Armstrong, J. & Silva, D., 2003, Proceedings, Volume 1. Taipei, Taiwan ed. Taiwan: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 178

Research output: Chapter in Book/Conference paperConference paper

2002
5 Citations (Scopus)

Optical coherence tomography: technology and applications

Sampson, D., Zvyagin, A. V., Smith, E. D. J., Silva, D. & Armstrong, J., 2002, 15th Biennial Congress 2002/ACOFT 2002. Physics, A. I. O. (ed.). Sydney, Australia ed. Australia: Australian Institute of Physics, Vol. Not applicable. p. 93

Research output: Chapter in Book/Conference paperConference paper

Optical coherence tomography as a tool for measuring hull thickness in lupin seeds

Silva, D., Zvyagin, A. V., Sampson, D., Wanner, T., Clements, J. & Cowling, W., 2002, The Third Inter University Postgraduate Electrical Engineering Symposium. Bahri, P. (ed.). Rockingham, Western Australia ed. Rockingham, Western Australia: Murdoch University, Vol. Not applicable. p. Not applicable

Research output: Chapter in Book/Conference paperConference paper

2000

Method for real-time colour doppler optical coherence tomography

Zvyagin, A. V., Fitzgerald, J. B., Silva, D. & Sampson, D., 2000, Conference on Lasers and Electro Optics, Europe 2000. Hall, D. R. & Silvestri, S. D. (eds.). Nice, France ed. Nice, France: IEEE, Institute of Electrical and Electronics Engineers, Vol. 00TH8505. p. 178-

Research output: Chapter in Book/Conference paperConference paper

1999

Closed Loop Optical Coherence Tomography for High Speed Profiling of Macroscopic Biological Surfaces

Silva, D., Zvyagin, A. V. & Sampson, D., 1999, The 1999 Conference of the Australian Optical Society. Chantler, C. T. & Farrell, P. M. (eds.). Sydney, Australia ed. Sydney, Australia: Australian Optical Society, Vol. n/a. p. MI86

Research output: Chapter in Book/Conference paperConference paper

Optical Delay Line with Centimetre Range and Metre-Per-Second Scan Rate for Motion-Artefact-Free Imaging by Fibre-Optic Coherence Tomography

Zvyagin, A. V., Silva, D., Moore, S. C., Armstrong, J. & Sampson, D., 1999, Proceedings ACOFT'99. Telecommunications & Information, E. E. S. (eds.). Sydney, Australia ed. Sydney, Australia: Information, Telecommunications and Electronics Engineering Society, Vol. 0. p. none

Research output: Chapter in Book/Conference paperConference paper