• The University of Western Australia (M018), 35 Stirling Highway,

    6009 Perth

    Australia

  • 358 Citations
  • 9 h-Index
19992021
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Research Output 1999 2019

2019

Atomic force microscopy with integrated on-chip interferometric readout

Zawierta, M., Jeffery, R. D., Putrino, G., Silva, D., Keating, A., Martyniuk, M. & Faraone, L., 1 Oct 2019, In : Ultramicroscopy. 205, p. 75-83 9 p.

Research output: Contribution to journalArticle

readout
Atomic force microscopy
chips
atomic force microscopy
deflection
2 Citations (Scopus)
242 Downloads (Pure)

Large area silicon-air-silicon DBRs for infrared filter applications

Silva, J., Kala, H., Tripathi, D., Silva, B., Martyniuk, M., Keating, A., Putrino, G. & Faraone, L., 1 Feb 2019, In : Journal of Lightwave Technology. 37, 3, p. 769-779 11 p., 8532288.

Research output: Contribution to journalArticle

Open Access
File
infrared filters
filters
air
silicon
Bragg reflectors
2 Citations (Scopus)

MEMS based hydrogen sensing with parts-per-billion resolution

Gurusamy, J. T., Putrino, G., Jeffery, R. D., Silva, K. K. M. B. D., Martyniuk, M., Keating, A. & Faraone, L., 15 Feb 2019, In : SENSORS AND ACTUATORS B-CHEMICAL. 281, p. 335-342 8 p.

Research output: Contribution to journalArticle

Method for optical modelling of non-uniform and non-parallel multi-thin film MEMS optical filters and mirrors

Silva, J., Thripathi, D., Kala, H., Silva, D., Putrino, G., Keating, A., Martyniuk, M. & Faraone, L., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 35-38 4 p. 8715240. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paperConference paper

Optical filters
optical filters
mirrors
filters
Thin films

Modelling and Charactrization of the MEMS based filters for the spectroscopic imaging applications

Tripathi, D. K., Kala, H., Silva, K. K. M. B. D., Martyniuk, M., Putrino, G., Nener, B. & Faraone, L., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 43-46 4 p. 8715253. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paperConference paper

Silicon
Full width at half maximum
microelectromechanical systems
MEMS
Distributed Bragg reflectors

Modelling of damping characteristics in silicon-gold bilayer cantilevers

Chenniappan, V., Silva, K. K. M. B. D., Umana-Membreno, G. A., Martyniuk, M., Keating, A., Dell, J. M. & Faraone, L., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 5-6 2 p. 8715248. (Conference on Optoelectronic and Microelectronic Materials and Devices).

Research output: Chapter in Book/Conference paperConference paper

Silicon
Gold
Damping
damping
gold

Silicon and Silicon dioxide thin films deposited by ICPCVD at low temperature and high rate for MEMS applications

Revuri, P. K., Tripathi, D. K., Martyniuk, M., Silva, K. K. M. B. D., Putrino, G., Keating, A. & Faraone, L., 14 May 2019, 2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018. IEEE, Institute of Electrical and Electronics Engineers, p. 24-26 3 p. 8715249. (2018 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2018).

Research output: Chapter in Book/Conference paperConference paper

Silicon oxides
Silicon
Deposition rates
Silicon Dioxide
microelectromechanical systems

Ultrathin tunable terahertz absorbers based on electrostatically actuated metamaterial

Liu, M., Susli, M., Silva, D., Putrino, G., Kala, H., Fan, S., Cole, M., Faraone, L., Wallace, V. P., Padilla, W. J., Powell, D. A., Shadrivov, I. V. & Martyniuk, M., 9 Oct 2019, Electro-Optical and Infrared Systems: Technology and Applications XVI. Hickman, D. L. & Bursing, H. (eds.). France: SPIE-INT SOC OPTICAL ENGINEERING, Vol. 11159. 1115908. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11159).

Research output: Chapter in Book/Conference paperConference paper

Metamaterials
Absorber
absorbers
microelectromechanical systems
MEMS
2018
1 Citation (Scopus)
Stress relaxation
Crystallization
Ion beams
Annealing
Thin films
2017
1 Citation (Scopus)
Surface micromachining
Deposition rates
Amorphous silicon
Temperature
Thin films
2 Citations (Scopus)

Control of Sidewall Profile in Dry Plasma Etching of Polyimide

Zawierta, M., Martyniuk, M., Jeffery, R. D., Putrino, G., Keating, A., Dilusha Silva, K. K. M. B. & Faraone, L., 1 Jun 2017, In : Journal of Microelectromechanical Systems. 26, 3, p. 593-600 8 p., 7888473.

Research output: Contribution to journalArticle

Plasma etching
Silicon oxides
Polyimides
Masks
MEMS

Fast tunable terahertz absorber based on a MEMS-driven metamaterial

Liu, M., Susli, M., Silva, D., Putrino, G., Kala, H., Fan, S., Cole, M., Faraone, L., Wallace, V. P., Padilla, W. J., Powell, D. A., Martyniuk, M. & Shadrivov, I. V., 25 Oct 2017, 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings. United States: IEEE, Institute of Electrical and Electronics Engineers, Vol. 2017-January. p. 1-2 2 p.

Research output: Chapter in Book/Conference paperConference paper

Metamaterials
microelectromechanical systems
MEMS
absorbers
Atoms
26 Citations (Scopus)

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

Liu, M., Susli, M., Silva, D., Putrino, G., Kala, H., Fan, S., Cole, M., Faraone, L., Wallace, V. P., Padilla, W. J., Powell, D. A., Shadrivov, I. V. & Martyniuk, M., 28 Aug 2017, In : Microsystems & Nanoengineering. 3, 6 p., 17033.

Research output: Contribution to journalArticle

Open Access

Detection of hydrogen using mechanical response of a microbridge

Gurusamy, J. T., Jeffery, R., Putrino, G., Silva, B., Martyniuk, M., Keating, A. & Faraone, L., 2016.

Research output: Contribution to conferenceAbstract

2 Citations (Scopus)
MEMS
Thermal expansion
Thin films
Inductively coupled plasma
Temperature

MEMS actuator geometries for extended range of actuation

Guo, F., Martyniuk, M., Silva, B., Bumgarner, J., Brookshire, K., Liu, Y. & Faraone, L., 2016.

Research output: Contribution to conferenceAbstract

7 Citations (Scopus)
352 Downloads (Pure)
Open Access
File
Infrared imaging
MEMS
Mirrors
Pixels
Bending (forming)
2015
2 Citations (Scopus)
Carrier concentration
Silicon
Carrier lifetime
Substrates
Semiconductor devices
4 Citations (Scopus)
255 Downloads (Pure)
Open Access
File
MOEMS
Mirrors
Infrared radiation
Optical constants
Growth temperature
8 Citations (Scopus)
183 Downloads (Pure)
Open Access
File
Distributed Bragg reflectors
Infrared imaging
MEMS
Wavelength
Focal plane arrays

Microelectromechanical systems (MEMS) and methods

Tripathi, D., Silva, B., Faraone, L., Bumgarner, J., Dell, J., Antoszewski, J., Martyniuk, M., Brookshire, K., Mao, H. & Liu, Y., 2015, Patent No. AU2015901600; WO/2016/176735A1

Research output: Patent

3 Citations (Scopus)
MOEMS
Inductively coupled plasma
Amorphous silicon
Vapors
Silicon
4 Citations (Scopus)
MOEMS
Distributed Bragg reflectors
Infrared radiation
Silicon
Wavelength
3 Citations (Scopus)
Distributed Bragg reflectors
Focal plane arrays
Optical filters
Infrared imaging
MEMS
2014

Capturing the Impulse Response of a Second Order System

Young, M., Jeffery, R., Putrino, G., Silva, D., Martyniuk, M., Keating, A. & Faraone, L., 2014, Conference on Optoelectronic and Microelectronic Materials and Devices. United States of America: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 174-176

Research output: Chapter in Book/Conference paperConference paper

3 Citations (Scopus)

Long-term Stability of ICPCVD a-Si Under Prolonged Heat Treatment

Brookshire, K., Martyniuk, M., Silva, D., Liu, Y. & Faraone, L., 2014, Conference on Optoelectronic and Microelectronic Materials and Devices. Perth, Western Australia: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 160-163

Research output: Chapter in Book/Conference paperConference paper

Low Temperature Through-Wafer Reactive Ion Etching for MEMS

Zawierta, M., Antoszewski, J., Martyniuk, M., Keating, A., Silva, D., Putrino, G., Jeffery, R. & Faraone, L., 2014, Proceedings of the 2014 Conference on Optoelectronic and Microelectronic Materials & Devices (COMMAD 2014). United States of America: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 83-86

Research output: Chapter in Book/Conference paperConference paper

2 Citations (Scopus)

Nanoindentation of Si1-xGex thin films prepared by biased target ion beam deposition

Ge, R., Hou, X., Brookshire, K., Krishnan, N. R., Silva, D., Bumgarner, J., Liu, Y., Faraone, L. & Martyniuk, M., 2014, Conference on Optoelectronic and Microelectronic Materials and Devices. Faraone, L. & Martyniuk, M. (eds.). USA: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 210-213 (Conference on Optoelectronic and Microelectronic Materials and Devices).

Research output: Chapter in Book/Conference paperConference paper

Optical sensor

Dell, J., Martyniuk, M., Keating, A., Putrino, G., Faraone, L., Jeffery, R. & Silva, B., 2014, Patent No. AU2014903446

Research output: Patent

Optical sensor

Dell, J., Martyniuk, M., Keating, A., Putrino, G., Faraone, L., Jeffery, R. & Silva, B., 2014, Patent No. AU2014903439

Research output: Patent

Optical Sensor

Dell, J., Martyniuk, M., Keating, A., Putrino, G., Faraone, L., Jeffery, R. & Silva, B., 2014, Patent No. AU2014218457

Research output: Patent

Optical sensor with 2d grating

Dell, J., Faraone, L., Jeffery, R., Keating, A., Martyniuk, M., Putrino, G. & Silva, B., 2014, Patent No. AU2014903446; PCT/AU2015/050506; WO2016029274 A1

Research output: Patent

4 Citations (Scopus)

Recent developments towards low-cost MEMS spectrometers

Silva, D., Tripathi, D. K., Mao, H., Antoszewski, J., Nener, B., Dell, J. & Faraone, L., 2014, Proceedings of SPIE - The International Society for Optical Engineering. SPIE, Vol. 9101. p. 910108

Research output: Chapter in Book/Conference paperConference paper

MEMS
Spectrometers
Infrared radiation
Costs

Stimulating an optical sensor using optical radiation pressure

Dell, J., Faraone, L., Jeffery, R., Keating, A., Martyniuk, M., Putrino, G. & Silva, B., 2014, Patent No. AU2014903439; PCT/AU2015/050505; WO2016029273

Research output: Patent

Towards MEMS-based Long-wavelength Infrared Tuneable Fabry-Perot Filters

Mao, H. F., Martyniuk, M., Silva, D., Antoszewski, J., Bumgarner, J. & Faraone, L., 2014, COMMAD 2014 Conference Proceedings. United States of America: IEEE, Institute of Electrical and Electronics Engineers, Vol. N/A. p. 149-152

Research output: Chapter in Book/Conference paperConference paper

2013
1 Citation (Scopus)

A silicon based surface micro-machined distributed Bragg reflector for MEMS spectroscopic applications

Tripathi, D., Silva, D., Rafiei, R., Bumgarner, J., Martyniuk, M., Nguyen, T., Antoszewski, J., Dell, J. & Faraone, L., 2013, 2013 IEEE 8th International Conference on Industrial and Information Systems (ICIIS) Conference Proceedings. United States of America: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 289-293

Research output: Chapter in Book/Conference paperConference paper

A system and method of performing atomic force measurements

Dell, J., Martyniuk, M., Keating, A., Putrino, G., Faraone, L. & Silva, B., 2013, Patent No. USA/13/761987; US2013/0205455); US 14/846570; US20160231352 A1

Research output: Patent

3 Citations (Scopus)

A Versatile Instrumentation System for MEMS-Based Device Optical Characterisation

Rafiei, R., Basedow, R., Silva, D., Gurusamy, J., Silva Castillo, J., Tripathi, D., Dell, J. & Faraone, L., 2013, Proceedings of SPIE Micro/Nano Materials, Devices and Systems. United States of America: SPIE, Vol. 8923. p. 89232V-1 - 89232V-9

Research output: Chapter in Book/Conference paperConference paper

1 Citation (Scopus)

Cryogenic optical profilometry for the calculation of coefficient of thermal expansion in thin films

Brookshire, K. L., Rafiei, R., Martyniuk, M., Silva, D., Bumgarner, J., Basedow, R., Liu, Y. & Faraone, L., 2013, Proceedings of SPIE Micro+Nano Materials, Devices, and Applications. United States of America: SPIE, Vol. 8923. p. 8923V-1 - 89231V-6

Research output: Chapter in Book/Conference paperConference paper

Efficient sub-harmonic phase-screen generation for modelling of free-space laser communications

Silva, D. & Nener, B., 2013, 2013 8th IEEE International Conference on Industrial and Information Systems (ICIIS). USA: IEEEE, Vol. 2013. p. 219-223

Research output: Chapter in Book/Conference paperConference paper

1 Citation (Scopus)

Long-wavelength infrared Fabry-Perot etalon for multi-spectral thermal imaging

Mao, H. F., Keating, A., Silva, D., Dell, J. & Faraone, L., 2013, Proceedings of the 2015 SPIE Micro/Nano Materials, Devices and Systems. United States of America: SPIE, Vol. 8923. p. 89234P-1 - 89234P-6

Research output: Chapter in Book/Conference paperConference paper

Macromodel for the transient simulation of electrostatically actuated fixed-fixed beams

Susli, M., Boussaid, F., Silva, D., Faraone, L. & Dell, J., 2013, IEEE International Conference on Circuits and Systems (ICCAS2013). USA: IEEE, Institute of Electrical and Electronics Engineers, Vol. NA. p. 130-134

Research output: Chapter in Book/Conference paperConference paper

2012

A high-sensitivity mass sensor based on torsion of micro-beams

Chenniappan, V., Martyniuk, M., Silva, D., Keating, A., Dell, J. & Faraone, L., 2012, APMC10 / ICONN2012 / ACMM22 CONFERENCE PROCEEDINGS. Australia: The University of Western Australia, Vol. 1. p. 818-1 - 818-2

Research output: Chapter in Book/Conference paperConference paper

Compositional and mechanical properties of PECVD silicon for thin-film optical applications

Tripathi, D. K., Mao, H., Silva, D. & Faraone, L., 2012, COMMAD 2012 PROCEEDINGS. United States: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 185-186

Research output: Chapter in Book/Conference paperConference paper

2 Citations (Scopus)

Effect of FIB milling on MEMS SOI Cantilevers

Chenniappan, V., Singh, P. P., Renilkumar, M., Varma, M., Bhat, N., Pratap, R., Martyniuk, M., Keating, A., Umana Membreno, G. A., Silva, D., Dell, J. & Faraone, L., 2012, Optoelectronic and Microelectronic Materials & Devices (COMMAD), 2012 Conference on. United States: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 165-166

Research output: Chapter in Book/Conference paperConference paper

microelectromechanical systems
ion beams
insulators
silicon
wafers

Optical read-out scheme based on Grated Waveguide Cantilever cavity resonance for interrogation of cantilever sensor arrays

Prakash, P., Renilkumar, M., Chenniappan, V., Faraone, L., Umana Membreno, G. A., Silva, D., Keating, A., Martyniuk, M., Dell, J., Varma, M. M., Bhat, N. & Pratap, R., 2012, COMMAD 2012 PROCEEDINGS. United States: IEEE, Institute of Electrical and Electronics Engineers, Vol. 1. p. 69-70

Research output: Chapter in Book/Conference paperConference paper