Zeiss 1555 VP-FESEM

    Facility/equipment: Equipment

    • Location

      CMCA@Physics, (M010), University of Western Australia, 35 Stirling Highway Perth WA 6009

      Australia

    Description

    The Zeiss 1555 VP-FESEM is a high-resolution, field-emission variable-pressure (VP) scanning electron microscope (SEM). The instrument can operate in normal high-vacuum SEM mode or in variable-pressure mode (VPSEM) with a chamber gas (usually air) pressure up to ~130 Pa, and at low temperature (cryoSEM). In SEM mode state-of-the-art performance including sub-nanometre beam resolution (@20kV) and very low voltage (to 100v) imaging conditions can be achieved. In VPSEM, samples can be imaged uncoated with medium resolution. With cryo samples can be imaged frozen, at temperatures as low as -150C. In all modes X-ray microanalysis can be performed using Oxford Instruments X-Max 80 silicon drift EDS system with AZtec and INCA software. It is capable of analysis for elements in the range Be to Pu. Capable of processing X-Ray count rates in excess of 500,000 cps, it can also rapidly generate X-ray element distribution maps and line profiles. AZtec TruMap and TruLine software applies background and overlap corrections to map and line data to provide artefact-free element distribution images. QuantMap software in the INCA package can provide quantitative mapping data. The instrument is optimised for routine low-voltage (<5 kV) medium-high resolution imaging and is suited to samples from all fields.

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    electron microscopes
    computer programs
    low voltage
    scanning
    x rays
    high resolution
    high vacuum
    microanalysis
    artifacts
    field emission
    chambers
    air
    silicon
    profiles
    gases
    temperature

    Research technique

    • Secondary electron (SE) imaging
    • Backscattered Electron (BSE) imaging
    • Energy-Dispersive X-ray Spectroscopy (EDX/EDS/EDXS)
    • Cryo Scanning Electron Microscopy
    • Cryo Energy-Dispersive X-ray Spectroscopy (EDX/EDS/EDXS)