FEI Verios XHR SEM

The Verios XHR SEM was installed in May 2014 and is the first instrument of its kind in Australia.

It is the second generation of FEI's Extreme High Resolution SEM family, offering sub-nanometre resolution over the full 1 kV to 30 kV operating voltage range with excellent materials contrast and extraordinary low-voltage performance for extremely precise, surface-specific analysis.

The microscope is equipped with an array of in-lens, in-column, and chamber detectors, bright field, dark field and high angle annular dark field STEM detectors, and 80 mm2 Oxford Instruments X-Max SDD EDX detector for microanalysis. Using FEI's MAPS imaging software, automatic acquisition of large images and correlative workflows, for example combining optical microscopy and SEM, are made possible.

This facility was funded through the Australian Research Council (LIEF grant LE130100011), with support from UWA, Murdoch, ECU and the WA Botanic Gardens and Parks Authority.

To cite this equipment/component: Centre for Microscopy, Characterisation & Analysis. (2018). FEI Verios XHR SEM . University of Western Australia. https://doi.org/10.26182/4FDG-DJ55