FEI Verios XHR SEM

    Facility/equipment: Equipment

    • Location

      CMCA@Physics, (M010), University of Western Australia, 35 Stirling Highway Perth WA 6009

      Australia

    Description

    The Verios XHR SEM was installed in May 2014 and is the first instrument of its kind in Australia.

    It is the second generation of FEI's Extreme High Resolution SEM family, offering sub-nanometre resolution over the full 1 kV to 30 kV operating voltage range with excellent materials contrast and extraordinary low-voltage performance for extremely precise, surface-specific analysis.

    The microscope is equipped with an array of in-lens, in-column, and chamber detectors, bright field, dark field and high angle annular dark field STEM detectors, and 80 mm2 Oxford Instruments X-Max SDD EDX detector for microanalysis. Using FEI's MAPS imaging software, automatic acquisition of large images and correlative workflows, for example combining optical microscopy and SEM, are made possible.

    This facility was funded through the Australian Research Council (LIEF grant LE130100011), with support from UWA, Murdoch, ECU and the WA Botanic Gardens and Parks Authority.

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    scanning electron microscopy
    detectors
    microanalysis
    low voltage
    acquisition
    chambers
    microscopes
    lenses
    microscopy
    computer programs
    high resolution
    electric potential